Nikon files patent case against ASML, Carl Zeiss over lithography tech

FRANKFURT (Reuters) - Japan's Nikon filed lawsuits against Netherlands-based ASML, the world's third-largest chip equipment maker, and Germany's Carl Zeiss [CZTOP.UL], saying its lithography technology was illegally used by the two.

from Reuters: Technology News http://ift.tt/2pW4SeG